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Daniel M. Dobkin | Michael K. Zuraw Principles of chemical vapor deposition
"This book will be invaluable to process engineers, graduate students and researchers newly involved in the development of processes and hardware for chemical vapor deposition. - In addition, the book is appropriate for senior level undergraduates or graduate courses on chemical vapor deposition as well as semiconductor manufacturing and coating technologies."--BOOK JACKET
Non-fictie
Engels | 273 pagina's | Kluwer Academic Publishers, Dordrecht [etc.] | 2003
Gedrukt boek